High-precision full-scale XYZ stage

High-precision Full-scale XYZ Stage

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产品概述 Product Overview

High-precision full-scale XYZ stage with the welded bellows provides X, Y and Z movements. This series adopts linear slider and high precision ball screw, which is strong and compact in structure.

With servo motor and grating ruler, sub-micron precision can be achieved, and the stage can be matched with high precision DPRF.
It is designed as a module with a wide range of optional configurations. Please contact for more information.

规格说明 Specification

● Working Pressure：10^-11mbar~1 bar	● Bakeable to 120℃ (just bellow)	● Welded Bellows Seal with SS 316
● Clear Bore up to 102mm	● Servo motor driver	● linear slider and high precision ball screw
● Optical Encoder	● Resolution: 0.2μm	● Top mounting flange: CF100, clear hole
● Bottom mounting flange: CF150, clear hole	● minimum flange to flange(compressed)distance is 410.5mm

A Flange OD		B Flange OD		XY Movement	Z Movement
mm	inch	mm	inch	mm
152	6	203	8	±12.5	Up to 650

产品尺寸 Dimension Drawing

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